JPH0221740U - - Google Patents

Info

Publication number
JPH0221740U
JPH0221740U JP10025688U JP10025688U JPH0221740U JP H0221740 U JPH0221740 U JP H0221740U JP 10025688 U JP10025688 U JP 10025688U JP 10025688 U JP10025688 U JP 10025688U JP H0221740 U JPH0221740 U JP H0221740U
Authority
JP
Japan
Prior art keywords
loop
shaped conveyor
thin film
substrates
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10025688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10025688U priority Critical patent/JPH0221740U/ja
Publication of JPH0221740U publication Critical patent/JPH0221740U/ja
Pending legal-status Critical Current

Links

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  • Liquid Crystal (AREA)
JP10025688U 1988-07-28 1988-07-28 Pending JPH0221740U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10025688U JPH0221740U (en]) 1988-07-28 1988-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10025688U JPH0221740U (en]) 1988-07-28 1988-07-28

Publications (1)

Publication Number Publication Date
JPH0221740U true JPH0221740U (en]) 1990-02-14

Family

ID=31328175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10025688U Pending JPH0221740U (en]) 1988-07-28 1988-07-28

Country Status (1)

Country Link
JP (1) JPH0221740U (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005228771A (ja) * 2004-02-10 2005-08-25 Shinko Electric Co Ltd 基板搬送方法、及びその装置
JP2009515368A (ja) * 2005-11-07 2009-04-09 ブルックス オートメーション インコーポレイテッド 小容積キャリヤ搬送体、積載ポート、バッファーシステム
JP2009537075A (ja) * 2006-05-11 2009-10-22 ブルックス オートメーション インコーポレイテッド 低減容量キャリア、搬送機、積載ポート、緩衝装置システム
JP2014123660A (ja) * 2012-12-21 2014-07-03 Senju Metal Ind Co Ltd 搬送処理システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005228771A (ja) * 2004-02-10 2005-08-25 Shinko Electric Co Ltd 基板搬送方法、及びその装置
JP2009515368A (ja) * 2005-11-07 2009-04-09 ブルックス オートメーション インコーポレイテッド 小容積キャリヤ搬送体、積載ポート、バッファーシステム
JP2009537075A (ja) * 2006-05-11 2009-10-22 ブルックス オートメーション インコーポレイテッド 低減容量キャリア、搬送機、積載ポート、緩衝装置システム
JP2014123660A (ja) * 2012-12-21 2014-07-03 Senju Metal Ind Co Ltd 搬送処理システム

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